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Material Safety Data Sheet

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Tetrafluoromethane (CF4) Carbonyl Fluoride (COF2)
Carbon Monoxide (CO) Nitrous Oxide (N2O)
Difluoromethane (CH2F2) Methane (CH4)
Ethylene (C2H4) Methyl Fluoride (CH3F)
Ethylene Oxide (C2H4O) Octafluorocyclobutane (C-318)
Hydrogen Sulfide (H2S) Propane (C3H8)
Helium (He) Sulfur Hexafluoride (SF6)
Hexafluoroethane (C2F6) Silane (SiH4)
Hexafluoropropylene (C3F6) Sulfur Dioxide (SO2)
Isobutane (C4H10) Trifluoromethane (CHF3)

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